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Digital Mass Flow Controller Product List

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High-Temperature Mass Flow Controller MC-3000L-TC series

High-Temperature Mass Flow Controller MC-3000L-TC series

This is a high-temperature compatible model of the high-performance digital mass flow controller MC-3000L series, which has a variety of features.

This is a high-temperature digital mass flow controller in a 1.125-inch size that achieves high precision of 1.0% F.S. with proprietary patented technology. It is ideal for controlling high-temperature gases such as water vapor. 【Features】 ○ RoHS compliant ○ Operating temperature up to 120°C, baking temperature up to 150°C (non-energized) ○ Equipped with a digital interface RS-485 ○ Features a sensor with proprietary patented technology ○ High-temperature compatible, high-precision digital MFC *For other functions and details, please download the catalog.

  • Piping Materials
  • Vacuum Equipment
  • Flow Control
  • Digital Mass Flow Controller

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MODEL EX-250S SERIES

MODEL EX-250S SERIES

RS485 communication function available! Compact design digital mass flow controller/meter.

The "MODEL EX-250S SERIES" is a compact digital mass flow controller/meter that allows for the switching of gas types using a rotary switch. It features RS485 communication capabilities and offers selectable analog input/output of 0-5VDC/4-20mA, as well as power supply options of ±15VDC/24VDC. The total flow control range has a response time of within 1 second. Please feel free to consult us when you need assistance. 【Features】 ■ Target fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 5 SCCM to 10 SLM ■ Accuracy: ±1% F.S. ■ Compact design ■ Gas type switching possible with a rotary switch *For more details, please refer to the PDF materials or feel free to contact us.

  • Flow Meter
  • Digital Mass Flow Controller

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Compact Digital Mass Flow Controller

Compact Digital Mass Flow Controller

Supports 300mm wafer process.

Mass flow controller that achieves high precision and fast response over a wide range.

  • Flow Control
  • Digital Mass Flow Controller

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High-performance mass flow controller MC-3000L series

High-performance mass flow controller MC-3000L series

This is a high-performance digital mass flow controller that employs our proprietary self-temperature compensation method (patented in the U.S. and Japan).

This is a digital mass flow controller that achieves high precision of 1.0% S.P. with its unique patented technology and is compatible with various surface mount standards (1.125 inches). 【Features】 ○ High-performance 1.125-inch size digital mass flow controller (piezo valve, high precision (S.P. guaranteed), digital control) ○ Maintains compatibility with analog mass flow controllers ○ Universal interface RS485 is available ○ Standard ultra-clean specifications with metal seals and precision polished inner surfaces ○ Compatible with various surface mount standards of SEMI STD. *For other functions and details, please download the catalog.

  • Piping Materials
  • Vacuum Equipment
  • Flow Control
  • Digital Mass Flow Controller

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MODEL EX-550 SERIES

MODEL EX-550 SERIES

Introducing metal seal digital mass flow controllers/meters for N2, Air, H2, and more!

The "MODEL EX-550 SERIES" is a metal-sealed digital mass flow controller/meter that allows for gas type switching via a rotary switch. It enables high-precision measurement with S.P. accuracy, and the entire flow control range responds within 1 second. It features RS485 communication capabilities and allows for the selection of analog input/output of 0-5VDC/4-20mA and power supply of ±15VDC/24VDC. 【Features】 ■ Target fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: 10 SCCM to 5 SLM ■ Accuracy: ±1% S.P. (25-100% F.S.), ±0.25% F.S. (up to 25% F.S.) ■ High-precision measurement is possible with S.P. accuracy ■ Gas type switching is possible via a rotary switch *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Meter
  • Digital Mass Flow Controller

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Gas Mixing Device "BRENDA SERIES"

Gas Mixing Device "BRENDA SERIES"

Automatic calculation of gas flow rates for each line! Remote control via mobile devices is possible.

The "BRENDA SERIES" has made it possible to produce mixed gases with an accurate gas mixing ratio using a high-performance digital mass flow controller. Additionally, the adoption of an 8-inch touch panel has simplified the setting of mixed gas concentration and flow rate. This product is also feature-rich, equipped with a standard VNC server function, enabling remote operation via a network and remote control via mobile devices through a wireless access point. 【Features】 ■ High-performance digital mass flow controller ■ Ratio setting mode ■ Step mode ■ VNC server function ■ Data logging function *For more details, please refer to the PDF document or feel free to contact us.

  • Gas Generator
  • Digital Mass Flow Controller

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